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arXiv quant-ph

Highly uniform first-electron position in qubit arrays fabricated on dedicated QSOI(R) 300mm commercial platform

Researchers reported progress on a quantum silicon-on-insulator (QSOI) substrate derived from a 28nm fully-depleted silicon-on-insulator platform, intended for 300mm CMOS-compatible fabrication of spin qubits. They fabricated quantum devices on both standard 28nm FD-SOI and the QSOI variant and compared them. The QSOI arrays showed highly uniform positioning of the first electron across qubit sites.

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